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AUTOMATED GENERATION OF MASK FILE FROM THREE DIMENSIONAL MODEL FOR USE IN GRAYSCALE LITHOGRAPHY

机译：三维平版印刷术中使用三维模型自动生成面具文件

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摘要

A method, apparatus and program product automatically generate a grayscale lithography mask file (76) from a three dimensional (3D) model (72) of a desired topography, e.g., as generated by a three dimensional computer aided design (CAD) tool (70).

机译：一种方法，装置和程序产品，其根据所需地形的三维（3D）模型（ 72 ）自动生成灰度光刻掩模文件（ 76 ），例如由三维计算机辅助设计（CAD）工具（ 70 ）生成。 展开▼

著录项

公开/公告号US2015121318A1

专利类型

公开/公告日2015-04-30

原文格式PDF

申请/专利权人 UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION INC.;
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申请/专利号US201314396977

发明设计人 JAMES LOOMIS;CURTIS MCKENNA;KEVIN M. WALSH;
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申请日2013-04-24

分类号G06F17/50;

国家 US

入库时间 2022-08-21 15:22:21

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专利

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1. 基于扩展模型文件的二次设备三维模型自动生成方法 [P] . 中国专利： CN110796730A . 2020-02-14

2. 三维模型编码装置、三维模型解码装置、三维模型编码方法、以及三维模型解码方法 [P] . 中国专利： CN111316650A . 2020-06-19

3. Automated generation of mask file from three dimensional model for use in grayscale lithography [P] . 美国专利： US9275173B2 . 2016-03-01

机译：从三维模型自动生成掩模文件，用于灰度光刻

4. The method, apparatus, device and storage medium of the three-dimensional model generation method, this application is filed by China patent application filed in September 30, 2018, filed in The present invention claims the priority of the generation method, apparatus, device and storage medium of the three-dimensional model, and the whole content is incorporated into the present application as reference. [P] . JP2022501737A . 2022-01-06

机译：三维模型生成方法的方法，装置，装置和存储介质，本申请由2018年9月30日提交的中国专利申请提交，本发明提交了本发明的优先级，例如生成方法，装置，装置和三维模型的存储介质，以及整个内容被作为参考的本申请结合到本申请中。

5. AUTOMATED MASK FILE GENERATION FROM 3-D MODELING [P] . 世界知识产权组织专利： WO2013163300A1 . 2013-10-31

机译：通过3D建模自动生成模板文件

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