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Automated generation of mask file from three dimensional model for use in grayscale lithography

机译：从三维模型自动生成掩模文件，用于灰度光刻

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摘要

A method, apparatus and program product automatically generate a grayscale lithography mask file (76) from a three dimensional (3D) model (72) of a desired topography, e.g., as generated by a three dimensional computer aided design (CAD) tool (70).

机译：一种方法，装置和程序产品，其根据所需地形的三维（3D）模型（ 72 ）自动生成灰度光刻掩模文件（ 76 ），例如由三维计算机辅助设计（CAD）工具（ 70 ）生成。 展开▼

著录项

公开/公告号US9275173B2

专利类型

公开/公告日2016-03-01

原文格式PDF

申请/专利权人 UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION INC.;
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申请/专利号US201314396977

发明设计人 JAMES LOOMIS;CURTIS MCKENNA;KEVIN M. WALSH;
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申请日2013-04-24

分类号G06F17/50;G03F1/70;

国家 US

入库时间 2022-08-21 14:28:41

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1. 用于EUV光刻的掩模、EUV光刻系统和用于优化掩模的成像的方法 [P] . 中国专利： CN102947759B . 2016.03.02

2. 用于EUV光刻的掩模、EUV光刻系统和用于优化掩模的成像的方法 [P] . 中国专利： CN102947759A . 2013-02-27

3. AUTOMATED GENERATION OF MASK FILE FROM THREE DIMENSIONAL MODEL FOR USE IN GRAYSCALE LITHOGRAPHY [P] . 美国专利： US2015121318A1 . 2015-04-30

机译：三维平版印刷术中使用三维模型自动生成面具文件

4. The method, apparatus, device and storage medium of the three-dimensional model generation method, this application is filed by China patent application filed in September 30, 2018, filed in The present invention claims the priority of the generation method, apparatus, device and storage medium of the three-dimensional model, and the whole content is incorporated into the present application as reference. [P] . JP2022501737A . 2022-01-06

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5. AUTOMATED MASK FILE GENERATION FROM 3-D MODELING [P] . 世界知识产权组织专利： WO2013163300A1 . 2013-10-31

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