首页> 外国专利> GRAPHENE FIELD EFFECT TRANSISTOR WITH DIELECTRICS AND GATE ELECTRODES HAVING STABLE BEHAVIORS DESPITE HIGH STRAINS, AND MANUFACTURING METHOD OF THE SAME

GRAPHENE FIELD EFFECT TRANSISTOR WITH DIELECTRICS AND GATE ELECTRODES HAVING STABLE BEHAVIORS DESPITE HIGH STRAINS, AND MANUFACTURING METHOD OF THE SAME

机译:尽管具有高应变,但具有稳定行为的具有导电和栅电极的石墨烯场效应晶体管及其制造方法

摘要

The present invention relates to a graphene field effect transistor with dielectrics and gate electrodes having stable behaviors despite high strains and a method for manufacturing the same. According to an embodiment of the present invention, the method of manufacturing a graphene field effect transistor with dielectrics and gate electrodes having stable behaviors despite high strains includes a step of preparing a monolithically patterned graphene layer; a step of forming an insulating layer; and a step of forming a gate electrode. [Reference numerals] (AA) Patterned graphene; (BB) Rubber; (CC) Aerosol jet printing; (DD) Nozzle; (EE) Ion gel printing; (FF) Ethanol; (GG,HH) Stretch(transformation); (II) PEDOT:PSS printing; (JJ) Hexane evaporation
机译:石墨烯场效应晶体管及其制造方法技术领域本发明涉及一种尽管具有高应变但具有稳定性能的具有电介质和栅电极的石墨烯场效应晶体管及其制造方法。根据本发明的实施例,尽管具有高应变,但是具有具有稳定的行为的电介质和栅电极的石墨烯场效应晶体管的制造方法包括制备整体图案化的石墨烯层的步骤。形成绝缘层的步骤;形成栅电极的步骤。 [附图标记](AA)图案化的石墨烯; (BB)橡胶; (CC)气溶胶喷射印刷; (DD)喷嘴; (EE)离子凝胶印刷; (FF)乙醇; (GG,HH)拉伸(转换); (II)PEDOT:PSS印刷; (JJ)己烷蒸发

著录项

  • 公开/公告号KR101489866B1

    专利类型

  • 公开/公告日2015-02-06

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20130119462

  • 发明设计人 안종현;조정호;이승기;

    申请日2013-10-07

  • 分类号H01L29/786;H01L21/336;

  • 国家 KR

  • 入库时间 2022-08-21 14:58:43

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