ULTRATHIN ITO:Ce FILM DEPOSITED BY RF SUPERIMPOSED DC MAGNETRON SPUTTERING, A PREPARATION METHOD OF THE FILM AND A TOUCH PANEL INCLUDING THE SAME

摘要

The present invention relates to a transparent conductive ultrathin film used in a touch panel. The transparent conductive film includes: a transparent substrate; and a transparent conductive ultrathin film having the thickness of 20 to 40 nm and the surface resistivity of 50 to 150 /sq. The transparent conductive ultrathin film increases the plasma density and energy spread of sputter atoms near a substrate using the electromagnetic field to enhance the crystallinity and electrical properties of the transparent conductive ultrathin film. The present invention also includes oxide cerium to show low sheet resistance while having ultrathin thickness to be used as a touch panel.