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Control device, substrate processing method, substrate processing system, operation method of substrate processing system, load port control device, and substrate processing system including the same
Control device, substrate processing method, substrate processing system, operation method of substrate processing system, load port control device, and substrate processing system including the same
A control apparatus in a substrate treating system with a substrate treating apparatus having a physical load port for receiving pods for storing substrates, and a carrier transport system for transporting the pods to and from the physical load port. The control apparatus includes a virtual load port control device for allotting a virtual load port to the physical load port, and instructing the carrier transport system to perform a transporting operation to and from the virtual load port on an assumption that the virtual load port really exists.
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