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Nitride semiconductor structure, laminated structure, and the nitride semiconductor light-emitting element

机译:氮化物半导体结构,层叠结构以及氮化物半导体发光元件

摘要

In the nitride semiconductor structure to the m-plane as a principal, a plurality of crystal growing seed region 130 formed of a nitride semiconductor which extends within the following range 0 degrees 10 degrees with respect to a shaft, a plurality of crystal growing seed region comprising a lateral growth region 320b made of a nitride semiconductor that has spread to the c-axis direction from each, adjacent the plurality of crystal growing seed region spacing (S width) is 20μm or more.
机译:在以m平面为主的氮化物半导体结构中,由相对于轴在0度10度的以下范围内延伸的,由氮化物半导体形成的多个晶体生长种子区域130,多个晶体生长种子区域。包括由氮化物半导体制成的横向生长区域320b,该横向生长区域320b从彼此延伸到c轴方向,与多个晶体生长种子区域的间隔(S宽度)相邻,为20μm以上。

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