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Nitride semiconductor structure, laminated structure, and the nitride semiconductor light-emitting element
Nitride semiconductor structure, laminated structure, and the nitride semiconductor light-emitting element
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机译:氮化物半导体结构,层叠结构以及氮化物半导体发光元件
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摘要
In the nitride semiconductor structure to the m-plane as a principal, a plurality of crystal growing seed region 130 formed of a nitride semiconductor which extends within the following range 0 degrees 10 degrees with respect to a shaft, a plurality of crystal growing seed region comprising a lateral growth region 320b made of a nitride semiconductor that has spread to the c-axis direction from each, adjacent the plurality of crystal growing seed region spacing (S width) is 20μm or more.
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