首页> 外国专利> Semiconductor laminated body and method for manufacturing the same, method for manufacturing semiconductor device, semiconductor device, dopant composition, dopant injection layer, and method for forming doped layer

Semiconductor laminated body and method for manufacturing the same, method for manufacturing semiconductor device, semiconductor device, dopant composition, dopant injection layer, and method for forming doped layer

机译:半导体层叠体及其制造方法,半导体装置的制造方法,半导体装置,掺杂剂组合物,掺杂剂注入层以及掺杂层的形成方法

摘要

A first aspect of the present invention provides a method for producing a semiconductor laminate comprising a substrate having formed thereon a silicon layer with small surface unevenness and high continuity. The method of the first aspect of the present invention for producing a semiconductor laminate having a substrate 10 and a sintered silicon particle layer 5 on the substrate comprises (a) coating a silicon particle dispersion containing a dispersion medium and silicon particles dispersed in the dispersion medium, on a substrate 10 to form a silicon particle dispersion layer 1, (b) drying the silicon particle dispersion layer 1 to form a green silicon particle layer 2, (c) stacking a light-transmitting layer 3 on the green silicon particle layer, and (d) irradiating the green silicon particle layer 2 with light through the light-transmitting layer 3 to sinter the silicon particles constituting the green silicon particle layer 2, and thereby form a sintered silicon particle layer 5.
机译:本发明的第一方面提供一种用于制造半导体层压板的方法,该半导体层压板包括在其上形成有表面不平坦小且连续性高的硅层的基板。本发明的第一方面的用于生产具有衬底10和在衬底上的烧结的硅颗粒层5的半导体层压板的方法包括:(a)涂覆包含分散介质的硅颗粒分散体和分散在该分散介质中的硅颗粒然后,在基板10上形成硅颗粒分散层1,(b)干燥硅颗粒分散层1以形成绿色硅颗粒层2,(c)在绿色硅颗粒层上堆叠透光层3, (d)通过透光层3向绿色硅粒子层2照射光,从而烧结构成绿色硅粒子层2的硅粒子,从而形成烧结硅粒子层5。

著录项

  • 公开/公告号JP5818972B2

    专利类型

  • 公开/公告日2015-11-18

    原文格式PDF

  • 申请/专利权人 帝人株式会社;

    申请/专利号JP20140508112

  • 发明设计人 今村 哲也;富澤 由香;池田 吉紀;

    申请日2013-03-29

  • 分类号H01L21/20;H01L21/22;H01L21/225;H01L21/336;H01L29/786;H01L31/0352;

  • 国家 JP

  • 入库时间 2022-08-21 14:40:30

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