VACUUM DRYING APPARATUS AND VACUUM DRYING METHOD USING THE SAME

摘要

An embodiment of the present invention provides a vacuum drying apparatus and a vacuum drying method. The vacuum drying apparatus includes a chamber in which a substrate table is arranged, the chamber being provided with a wind deflector therein, wherein the wind deflector comprises a top opening, a bottom opening and a body part connecting the top opening with the bottom opening. During the vacuum drying, the bottom opening is in tight contact with a surface of the substrate table, and there is a gap between the top Opening and the top of the chamber and a material on the substrate table is covered by the wind deflector.