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Air Gaps Structures for Damascene Metal Patterning
Air Gaps Structures for Damascene Metal Patterning
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机译:镶嵌金属图案的气隙结构
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摘要
A pattern of parallel lines defines first regions where no conductive material is to be located, a distance between adjacent lines in the first regions being smaller than a predetermined distance, and defines second regions where conductive material is to be located, a distance between adjacent lines in the second regions being larger than the predetermined distance. A subsequent layer caps air gaps between lines in the first regions. Conductive material is then deposited and planarized to form lines of conductive material in the second regions.
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