首页> 外国专利> CHARGING DEVICE, METHOD FOR SUPPLYING BULK SILICON FEEDSTOCK, SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL

CHARGING DEVICE, METHOD FOR SUPPLYING BULK SILICON FEEDSTOCK, SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL

机译:充电装置,大容量硅馈电的供应方法,硅单晶制造装置以及硅单晶的制造方法

摘要

The purpose of the present invention is to provide a feedstock charging device in which damage caused to a bottom lid due to the impact of bulk silicon feedstock and the dropping of quartz pieces derived from the bottom lid into a silicon melt are prevented, and a method for supplying the bulk silicon feedstock using the same. This charging device charges the bulk silicon feedstock into a crucible storing the silicon melt. The charging device comprises a barrel into which the bulk silicon feedstock is charged, and a bottom lid that opens and closes a lower end opening of the barrel when the barrel is maintained in a vertically extended state. The bottom lid comprises quartz, and at least a portion of the upper surface of the bottom lid is covered by a metal plate.
机译:本发明的目的是提供一种原料装料装置,其中防止了由于散装硅原料的冲击而对底盖造成的损坏以及防止了源自底盖的石英片掉入硅熔体中的方法,以及一种方法。用于使用该原料供应散装硅原料。该装料装置将散装的硅原料装进储存硅熔体的坩埚中。装料装置包括:将大块硅原料装入其中的筒;以及底盖,当该筒保持在垂直延伸状态时,该底盖打开和关闭该筒的下端开口。底盖包括石英,并且底盖的上表面的至少一部分被金属板覆盖。

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