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CHARGING DEVICE, METHOD FOR SUPPLYING BULK SILICON FEEDSTOCK, SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
CHARGING DEVICE, METHOD FOR SUPPLYING BULK SILICON FEEDSTOCK, SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
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机译:充电装置,大容量硅馈电的供应方法,硅单晶制造装置以及硅单晶的制造方法
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摘要
The purpose of the present invention is to provide a feedstock charging device in which damage caused to a bottom lid due to the impact of bulk silicon feedstock and the dropping of quartz pieces derived from the bottom lid into a silicon melt are prevented, and a method for supplying the bulk silicon feedstock using the same. This charging device charges the bulk silicon feedstock into a crucible storing the silicon melt. The charging device comprises a barrel into which the bulk silicon feedstock is charged, and a bottom lid that opens and closes a lower end opening of the barrel when the barrel is maintained in a vertically extended state. The bottom lid comprises quartz, and at least a portion of the upper surface of the bottom lid is covered by a metal plate.
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