EVAPORATION SOURCE AND DEPOSITION APPARATUS HAVING SAME

摘要

The present invention relates to an evaporation source and a deposition apparatus having the same. According to an embodiment of the present invention, the evaporation source comprises: a crucible which has a receiving space to receive an evaporation material therein; a plurality of heating parts formed on an outer side of the crucible in a longitudinal direction, heating the crucible; a first temperature control part which allows the heating parts to selectively be connected thereto, controlling a temperature of a top of an evaporation surface of the evaporation material received in the receiving space; and a second temperature control part which allows the heating parts to be selectively connected thereto, controlling a temperature of a bottom of the evaporation surface of the evaporation material received in the receiving space wherein the heating parts, which are adjacent to the evaporation surface lowered in accordance with the exhaustion of the evaporation material, are disconnected from the second temperature control part, and then is electrically connected to the first temperature control part. As such, the present invention prevents a consumption of a heat source by heating an outer side of the crucible.;COPYRIGHT KIPO 2016