首页> 外国专利> EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL

EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL

机译:用于有机材料的蒸发源,具有用于有机材料的蒸发源的设备,具有具有用于有机材料的蒸发源的蒸发沉积设备的系统以及用于运行用于有机材料的蒸发源的方法

摘要

Evaporation sources for organic materials are described. The evaporation source being configured to evaporate the organic material; A distribution pipe-distribution pipe having one or more outlets in fluid communication with the evaporation crucible, the distribution pipe being rotatable about an axis during evaporation; And a support for the distribution pipe, wherein the support is connectable to the first drive or comprises a first drive and the first drive is configured for translational movement of the distribution pipe and the support.
机译:描述了有机材料的蒸发源。蒸发源被配置为蒸发有机材料。一种分配管-分配管,其具有一个或多个与蒸发坩埚流体连通的出口,该分配管在蒸发过程中可绕轴线旋转。以及一种用于分配管的支撑件,其中,该支撑件可连接至第一驱动器或包括第一驱动器,并且该第一驱动器构造成用于分配管和支撑件的平移运动。

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