ROLL TO ROLL VACUUM DEPOSITION SYSTEM FOR FLEXIBLE SUBSTRATE

摘要

A roll to roll vacuum deposition system includes a supply roll to continuously supply substrate units, a plurality of pattern units to form patterns on the substrate units, and a collection roll to continuously collect the substrate units provided thereon with patterns. Each of the pattern units includes an alignment unit, a pattern mask, a sensing unit, a stage, and a deposition unit. The alignment unit senses an alignment mark formed on the substrate unit to align the substrate unit. The pattern mask is spaced apart from the substrate unit. The sensing unit senses the gap between the substrate unit and the pattern mask. The stage is configured to allow the pattern mask to be mounted on the stage and controls the position of the pattern mask by feedbacking sensing information of the alignment unit and the sensing unit. The deposition unit deposits predetermined patterns on the substrate unit through the pattern mask.;COPYRIGHT KIPO 2016