Roll-to-Roll, Projection Lithography System for High-Resolution Patterning of Flexible Substrates, Volume 1

摘要

This Final Report describes the ANVIK 3100 SRE roll-to-roll lithography system which was shipped to Sheldahi, Inc. (Longmont, CO) in May 1998. The machine is currently being phased into Sheldahl's production facilities where it will be used for microelectronic fabrication on flexible substrates. In the Report, a general overview of the system is presented.