FILM DEPOSITION METHOD BY ROLL TO ROLL VACUUM DEPOSITION SYSTEM AND METHOD FOR CLEANING THE ROLL

摘要

PROBLEM TO BE SOLVED: To provide a simple and effective cleaning method which removes foreign matter stuck to rolls in a roll to roll vacuum film deposition system, and to provide a film deposition method which can reduce occurrence of the fine rugged defect of a metallic layer.;SOLUTION: A long adhesive sheet which at least has a width same as that of a long-length resin film F and is also peelable is conveyed along each roll such as a can roll 6 provided at the inside of a vacuum film deposition chamber 1 so as to remove foreign matter stuck to each roll. Thereafter, the long resin film F is conveyed along each roll which has been cleaned, and a metallic thin film is deposited on the surface of the long resin film F.;COPYRIGHT: (C)2010,JPO&INPIT