首页> 外国专利> CAPACITIVE CAPACITIVE MICROELECTRONIC AND / OR NANOELECTRONIC DEVICE WITH INCREASED COMPACITY

CAPACITIVE CAPACITIVE MICROELECTRONIC AND / OR NANOELECTRONIC DEVICE WITH INCREASED COMPACITY

机译:电容增加的电容式微电子和/或纳米电子设备

摘要

Mobile element device (13) extending in a given plane comprising at least a first (3), a second (10) and a third (12) layer lying in planes parallel to the given plane, the first layer ( 3) forming a support, the second layer (10) comprising all or part of the movable element (13) and suspension means (11) of the movable element (13) relative to the support and the third layer (12). ) comprising all or part of the capacitive means whose capacitance varies as a function of the relative position of the movable element (13) relative to the support (3), said capacitive means comprising at least one movable electrode (14) integral with a faces of the movable element (13) parallel to the given plane, and at least one fixed electrode (16) relative to the support (3), the fixed and mobile electrodes being arranged at least partly in the same plane parallel to the plane given and at least partly above and / or below the mobile element (13).
机译:在给定平面内延伸的移动元件设备(13)至少包括平行于给定平面的平面中的第一(3),第二(10)和第三(12)层,第一层(3)形成支撑,第二层(10)包括全部或部分可移动元件(13)以及相对于支撑件和第三层(12)的可移动元件(13)的悬挂装置(11)。 )包括全部或部分电容装置,其电容根据可移动元件(13)相对于支撑件(3)的相对位置而变化,所述电容装置包括至少一个与面成一体的可移动电极(14)可移动元件(13)平行于给定平面,并且至少一个固定电极(16)相对于支撑件(3),固定电极和移动电极至少部分地布置在与给定平面平行的同一平面上,并且至少部分地在移动元件(13)上方和/或下方。

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