Dynamic calibration method of capacitive pressure measuring device

摘要

This paper presents working principle,structure and a dynamic calibration method of capacitive pressure measuring device.Using this method,placing calibrated capacitive electronic pressure measuring device and three standard sensors in simulation chamber pressure generator is proper and the data generated by them are analyzed and compared.This calibration method realizes dynamic calibration of capacitive electronic pressure measuring device under actual working pressure;pressure signal and frequency spectrum are analyzed.The experimental results show that simulation chamber pressure calibration method is feasible.