首页> 外国专利> Solder ball supply method, solder ball supply device, and solder bump forming method

Solder ball supply method, solder ball supply device, and solder bump forming method

机译:焊球供应方法,焊球供应装置和焊锡凸块形成方法

摘要

Provided are a solder ball supply method, a solder ball supply device, and a solder bump forming method that are compatible with electrodes of a fine pitch without flux. A substrate 70 is prepared in which a resist 74 having an opening 76 is disposed on an electrode 72 having a diameter of 10 to 30 μm of the substrate 70 (FIG. 3A). Next, a plurality of solder balls SBL having a particle diameter of 1 to 10 μm are shaken down from the hopper 22 and filled into the openings 76 of the resist 74 (FIGS. 3B and 3C). Next, by sliding the squeegee 32 in the XY direction on the upper surface of the resist 74, the solder balls SBL shaken off other than the opening 76 are scraped off from the upper surface of the resist 74 and the inside of the opening 76 is removed. And the solder ball SBL in the periphery thereof is pushed into the opening 76 by the squeegee 32 (FIGS. 3D and 3E). As a result, the opening 76 of the resist 74 can be filled with the solder balls SBL at a high density.
机译:提供与无助焊剂的细间距电极兼容的焊球供应方法,焊球供应装置和焊锡凸点形成方法。制备基板70,其中具有开口76的抗蚀剂74设置在直径为基板70的直径10至30μm的电极72上(图3A)。接下来,将具有1至10μm的粒径的多个焊球SBL从漏斗22摇下来并且填充到抗蚀剂74的开口76中(图3B和3C)。接下来,通过使刮板32沿XY方向在抗蚀剂74的上表面上滑动,从开口74刮除除开口76以外的其他焊料球SBL,并且将开口76的内部删除。并且其周围的焊球SBL被刮板32推入开口76中(图3D和3E)。结果,可以以高密度用焊料球SBL填充抗蚀剂74的开口76。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号