首页> 外国专利> METHOD FOR MANUFACTURING LOW-TEMPERATURE POLYSILICON THIN FILM TRANSISTOR (TFT) SUBSTRATE AND LOW-TEMPERATURE POLYSILICON TFT SUBSTRATE

METHOD FOR MANUFACTURING LOW-TEMPERATURE POLYSILICON THIN FILM TRANSISTOR (TFT) SUBSTRATE AND LOW-TEMPERATURE POLYSILICON TFT SUBSTRATE

机译:低温多晶硅薄膜晶体管(TFT)基板和低温多晶硅TFT基板的制造方法

摘要

The present invention provides a method for manufacturing a low-temperature polysilicon thin film transistor (TFT) substrate and the low-temperature polysilicon TFT substrate. The method for manufacturing a low-temperature polysilicon thin film transistor (TFT) substrate comprises: forming a thermally-conductive insulation layer (3) having good insulation performance and a good heat conduction property on a buffering layer (2), so that the buffering layer (2) can absorb a large amount of heat and transfers the heat to an amorphous silicon layer (4) in contact with the buffering layer (3) during a rapid thermal annealing process, thereby improving the crystallization efficiency of amorphous silicon crystals at the position, the polysilicon (5) having larger grains and less grain boundaries is obtained, improving the migration rate of a carrier of a TFT device, and reducing the influence of the grain boundaries on leaked currents. In the low-temperature polysilicon TFT substrate, the thermally-conductive insulation layer (3) is disposed below the buffering layer (2) corresponding to a polysilicon semiconductor layer (50), the grain size of the polysilicon crystals is large, the number of the grain boundaries is small, so that the migration rate of the carrier of the TFT device is high, and the electrical property of the TFT is high.
机译:本发明提供一种制造低温多晶硅薄膜晶体管(TFT)基板和低温多晶硅TFT基板的方法。该低温多晶硅薄膜晶体管(TFT)基板的制造方法包括:在缓冲层(2)上形成具有良好的绝缘性能和导热性的导热绝缘层(3)。在快速热退火过程中,层(2)可以吸收大量的热并将热传递到与缓冲层(3)接触的非晶硅层(4),从而提高非晶硅晶体在晶界处的结晶效率。在该位置上,获得具有较大晶粒和较少晶界的多晶硅(5),从而提高了TFT器件的载流子的迁移速率,并减小了晶界对泄漏电流的影响。在低温多晶硅TFT基板中,在与多晶硅半导体层(50)相对应的缓冲层(2)的下方配置有导热性绝缘层(3),因此,多晶硅的结晶粒径大,晶格数多。晶界小,因此TFT装置的载体的迁移率高,TFT的电特性高。

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