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WAFER LEVEL INTEGRATION OF HIGH POWER SWITCHING DEVICES ON CMOS DRIVER INTEGRATED CIRCUIT

机译:CMOS驱动器集成电路上大功率开关器件的晶圆级集成

摘要

A semiconductor package module and the method for its fabrication are provided. The semiconductor package module includes a substrate, a driver integrated circuit (IC), one or more power switching devices and one or more highly conductive clips. Each of the one or more switching devices is physically integrated in the semiconductor package module at a wafer level and has a gate connected to the driver IC by a gate-to-driver interconnection. Each of the one or more highly conductive clips is connected to a source of a corresponding one of the one or more power switching devices by a source-to-clip interconnection. Also, each of the one or more highly conductive clips has a first surface planarly located in the semiconductor package with a similar first surface of the driver IC for co-bonding of the source-to- clip interconnections and the gate-to-driver interconnections.
机译:提供了一种半导体封装模块及其制造方法。该半导体封装模块包括基板,驱动器集成电路(IC),一个或多个功率开关器件以及一个或多个高导电夹。一个或多个开关装置中的每一个在晶片级处物理地集成在半导体封装模块中,并且具有通过门-驱动器互连而连接到驱动器IC的栅极。一个或多个高导电夹中的每一个通过源到夹互连而连接到一个或多个功率开关装置中的相应一个的源。而且,一个或多个高导电性夹中的每个具有平坦地位于半导体封装中的第一表面,该第一表面具有与驱动器IC相似的第一表面,用于将源极-夹具互连和栅极-驱动器互连共接合。 。

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