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- NEGATIVE-TONE RESIST COMPOSITIONS AND MULTIFUNCTIONAL POLYMERS THEREIN
- NEGATIVE-TONE RESIST COMPOSITIONS AND MULTIFUNCTIONAL POLYMERS THEREIN
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机译:-负色阻成分和其中的多功能聚合物
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摘要
There is provided a negative-tone resist composition containing a multifunctional polymer covalently bonded to a free mine-generator, and a mino-generating moiety, and free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist composition are also provided, and processes for producing a resist image on a substrate using the compositions and polymers of the present invention are also provided.
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