- NEGATIVE-TONE RESIST COMPOSITIONS AND MULTIFUNCTIONAL POLYMERS THEREIN

摘要

There is provided a negative-tone resist composition containing a multifunctional polymer covalently bonded to a free mine-generator, and a mino-generating moiety, and free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist composition are also provided, and processes for producing a resist image on a substrate using the compositions and polymers of the present invention are also provided.