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CAPACITIVE TYPE PRESSURE SENSOR WITH POROUS DIELECTRIC LAYER
CAPACITIVE TYPE PRESSURE SENSOR WITH POROUS DIELECTRIC LAYER
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机译:多孔介电层的电容式压力传感器
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摘要
According to the present invention, provided is a capacitive type pressure sensor, comprising: a first electrode layer; a second electrode layer spaced from the first electrode layer; and a dielectric layer formed between the first electrode layer and the second electrode layer. The dielectric layer is made of a porous elastomer.
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