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PIEZOCAPACITIVE TYPE PRESSURE SENSOR WITH POROUS DIELECTRIC LAYER
PIEZOCAPACITIVE TYPE PRESSURE SENSOR WITH POROUS DIELECTRIC LAYER
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机译:多孔介电层的压电电容型压力传感器
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摘要
According to the present disclosure, there is provided a piezocapacitive type pressure sensor including a first electrode layer, a second electrode layer spaced apart from the first electrode layer, and a dielectric layer formed between the first electrode layer and the second electrode layer, wherein the dielectric layer is made of a porous elastomer.
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