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FOCUS TEST MASK, FOCUS MEASURING METHOD, EXPOSURE APPARATUS, AND EXPOSURE METHOD
FOCUS TEST MASK, FOCUS MEASURING METHOD, EXPOSURE APPARATUS, AND EXPOSURE METHOD
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机译:焦点测试面罩,焦点测量方法,曝光设备和曝光方法
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摘要
A focus test reticle for measuring focus information includes an outer pattern. The outer pattern has a line pattern composed of a light shielding film extending in the Y direction, a phase shift portion provided on a side in the +X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the -X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the +X direction of the phase shift portion, and a phase shift portion provided on a side in the -X direction of the transmitting portion. Focus information of a projection optical system is measured at a high measuring reproducibility and a high measuring efficiency.
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