INSPECTION SYSTEM, WAFER MAP DISPLAY DEVICE, WAFER MAP DISPLAY METHOD, AND COMPUTER PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a technology by which a failure analysis of a tester can be performed in a short time, and a failure prediction can be also performed.SOLUTION: An inspection system 100 includes a prober 200 and a tester 300. The tester 300 includes a plurality of tester module boards 33 on each of which a plurality of LSIs respectively corresponding to a plurality of DUTs are mounted, a display unit 44 that displays a wafer map indicating inspection results of the plurality of DUTs and/or self-diagnosis results of the tester 300, and a tester control unit 35 including a wafer map drawing application 60 for drawing the wafer map to be displayed on the display unit 44, and the wafer map drawing application 60 displays the inspection result and/or the self-diagnosis result on each of the plurality of DUTs in stages, and the plurality of DUTs on the wafer map is associated with the plurality of LSIs mounted on the plurality of tester module boards 33.SELECTED DRAWING: Figure 1