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INSPECTION SYSTEM, WAFER MAP DISPLAY, WAFER MAP DISPLAY METHOD, AND COMPUTER PROGRAM
INSPECTION SYSTEM, WAFER MAP DISPLAY, WAFER MAP DISPLAY METHOD, AND COMPUTER PROGRAM
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机译:检查系统,晶片地图显示,晶片地图显示方法和计算机程序
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摘要
An inspection system is provided with a prober and a tester. The tester includes a plurality of tester module boards on which a plurality of LSIs respectively corresponding to a plurality of devices under test (DUT) are mounted; a display unit which displays a wafer map indicating inspection results of the plurality of DUTs and/or self-diagnosis results of the tester; and a tester control unit which includes a wafer map drawing application for drawing the wafer map displayed on the display unit. The wafer map drawing application causes the inspection results and/or the self-diagnosis results to be displayed for each of the plurality of DUTs in a stepwise manner. In the wafer map, the plurality of DUTs are respectively linked to correspond to the plurality of LSIs mounted on the plurality of tester module boards.
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