VACUUM PUMP, CHILLER OF VACUUM PUMP, COOLING METHOD OF VACUUM PUMP, VACUUM EVACUATION SYSTEM, AND MAINTENANCE METHOD OF VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To improve the product material capture in a capture device by preventing the product material from adhesion to the exhaust pipe of a vacuum pump.;SOLUTION: A vacuum pump comprises: a pump chamber having an inlet port 1121 and an exhaust port 1122; an exhaust pipe 113 connected to the exhaust port for introducing the exhaust air from the pump chamber to the outside of the vacuum pump; and a chiller 120 for cooling the exhaust pipe. The exhaust pipe includes: a first exhaust pipe portion 1131; and a second exhaust pipe portion 1132. The first exhaust pipe portion is connected to the exhaust port of the pump chamber; the second exhaust pipe portion is located at a position farther from the exhaust port of the pump chamber than the first exhaust pipe portion; and the chiller is disposed in the second exhaust pipe portion.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT