Exhaust system of vacuum pump, vacuum pump provided in exhaust system of vacuum pump, purge gas supply device, temperature sensor unit, and exhaust method of vacuum pump

摘要

[Problem] An exhaust system of a vacuum pump, a vacuum pump, a purge gas supply device, a temperature sensor unit, and a vacuum pump, which accurately measure the temperature of the rotating part, are realized. [Resolution] In the exhaust system of the vacuum pump according to the present embodiment, the flow rate of the purge gas is faster than the flow rate of the gas flowing back in at least a portion downstream of the temperature sensor unit at least when measuring the temperature of the rotating part. Supplies a purge gas of either the amount or the amount such that the gas pressure around the temperature sensor unit becomes an intermediate flow or a viscous flow. Moreover, the exhaust system of this embodiment has the purge gas supply apparatus which can control the flow volume of the purge gas introduce | transduced into a vacuum pump. This configuration prevents the backflow of the process gas around the temperature sensor unit at the time of temperature measurement, prevents the component composition from changing, and can accurately measure the temperature of the rotating part.