VACUUM PUMP EXHAUST SYSTEM, VACUUM PUMP TO BE PROVIDED TO VACUUM PUMP EXHAUST SYSTEM, PURGE GAS FEED DEVICE, TEMPERATURE SENSOR UNIT, AND VACUUM PUMP EXHAUST METHOD

摘要

A vacuum pump exhaust system, a vacuum pump provided for the vacuum pump exhaust system, a purge gas supply unit, a temperature sensor unit, and an exhausting method of the vacuum pump are achieved, by which a temperature of a rotating portion can be accurately measured. In the vacuum pump exhaust system according to the present embodiment, at least when the temperature of the rotating portion is measured, the vacuum pump supplies the purge gas to the vacuum pump such that an amount of the purge gas satisfies one of following conditions: an amount of the purge gas flowing at a higher velocity than a backflow velocity of gas exhausted by the vacuum pump on at least a part of a downstream side of the temperature sensor unit, and an amount of the purge gas having a pressure of one of an intermediate flow and a viscous flow around the temperature sensor unit. The exhaust system of the present embodiment further includes a purge gas supply unit capable of controlling a flow rate of purge gas introduced into the vacuum pump. This configuration can prevent process gas from flowing backward so as to change the composition around the temperature sensor unit, thereby accurately measuring the temperature of the rotating portion.