Micro battery structure with hermetically sealed micro battery groups

摘要

A micro battery structure for a hermetically sealed micro battery is provided. The microbattery structure includes a first silicon substrate including at least one protrusion that receives a cathode material of the microbattery and at least one recess that receives a first sealing material of the microbattery. The structure further includes a second silicon substrate including at least one protrusion for receiving the anode material of the microcell and at least one recess for receiving the second sealing material of the microcell. An insulating center piece is bonded to the first sealing material present in at least two recesses on the first silicon substrate. An interlock structure is formed by aligning and overlaying a second silicon substrate on the first silicon substrate in a mortise manner and sealing the two substrates with a large force. [Selection] Figure 1