Scanning transmission electron microscope equipped with an electron beam energy loss spectrometer and its observation method

摘要

The object of the present invention relates to high-resolution observation of bright field STEM, dark field image STEM and EELS at a low acceleration voltage. The present invention provides a STEM detector (11, 13) and an electron beam by changing the arrangement of the sample with respect to the optical axis direction of the primary electron beam in a transmission scanning electron microscope equipped with an electron beam energy loss spectrometer (17). It relates to controlling the capture angle of the energy loss spectrometer (17). According to the present invention, it is possible to easily control the optimum scattering angle for each of the bright field STEM, dark field STEM, and EELS while suppressing the occurrence of chromatic aberration associated with the control of the capture angle.