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Scanning transmission electron microscope equipped with an electron beam energy loss spectrometer and its observation method
Scanning transmission electron microscope equipped with an electron beam energy loss spectrometer and its observation method
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机译：装有电子束能量损失谱仪的扫描透射电子显微镜及其观察方法
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摘要
According to the present invention, it is possible to easily control an optimum scattering angle in each of a light field STEM, a dark field STEM, and an EELS while suppressing occurrence of chromatic aberration accompanying the controlling on the incorporation angle.
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