Method for suppressing non-uniform growth and autodoping during III-V growth in a dielectric window

摘要

A method for depositing a column III-V material over a selected portion of a substrate through a window formed in a dielectric layer disposed over the selected portion of the substrate. The method includes forming a single crystal layer or polycrystalline layer over a field region of the dielectric layer adjacent to the window; and, growing, by MOCVD, column III-V material over the single crystal layer or polycrystalline layer and through the window over the selected portion of the substrate.