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Method for forming at least one electrical discontinuity in an interconnection part of an integrated circuit without addition of additional material, and corresponding integrated circuit

机译:在集成电路的互连部分中形成至少一个电中断而不添加额外材料的方法以及相应的集成电路

摘要

An integrated circuit includes an interconnection part with a via level situated between a lower metallization level and an upper metallization level. The lower metallization level is covered by an insulating encapsulation layer and an inter-metallization level insulating layer. An electrical discontinuity is provided between a via of the via level and a metal track of the lower metallization level. The electrical discontinuity is formed by an additional insulating layer having a material composition identical to that of the inter-metallization level insulating layer. The electrical discontinuity is situated between a bottom of the via and a top of the metal track, with the discontinuity being bordered by the insulating encapsulation layer.
机译:一种集成电路,其包括互连部分,该互连部分具有位于较低金属化层和较高金属化层之间的通孔层。较低的金属化层被绝缘封装层和金属化层间绝缘层覆盖。在通孔层的通孔和较低金属化层的金属轨道之间提供电中断。通过具有与金属间层间绝缘层的材料成分相同的材料成分的附加绝缘层形成电不连续性。电不连续性位于通孔的底部与金属轨道的顶部之间,该不连续性由绝缘封装层界定。

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