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Oxide-based three-terminal resistive switching logic devices

机译:基于氧化物的三端电阻式开关逻辑器件

摘要

Oxide-based three-terminal resistive switching logic devices and methods of fabricating oxide-based three-terminal resistive switching logic devices are described. In a first example, a three-terminal resistive switching logic device includes an active region disposed above a substrate. The active region includes an active oxide material region disposed directly between a metal source region and a metal drain region. The device also includes a gate electrode disposed above the active oxide material region. In a second example, a three-terminal resistive switching logic device includes an active region disposed above a substrate. The active region includes a first active oxide material region spaced apart from a second oxide material region. The device also includes metal input regions disposed on either side of the first and second active oxide material regions. A metal output region is disposed between the first and second active oxide material regions.
机译:描述了基于氧化物的三端子电阻开关逻辑器件和制造基于氧化物的三端子电阻开关逻辑器件的方法。在第一示例中,三端子电阻开关逻辑器件包括设置在衬底上方的有源区。有源区域包括直接设置在金属源极区域和金属漏极区域之间的有源氧化物材料区域。该器件还包括设置在活性氧化物材料区域上方的栅电极。在第二示例中,三端子电阻开关逻辑器件包括设置在基板上方的有源区。活性区域包括与第二氧化物材料区域间隔开的第一活性氧化物材料区域。该器件还包括设置在第一和第二活性氧化物材料区域的任一侧上的金属输入区域。金属输出区域设置在第一和第二活性氧化物材料区域之间。

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