Techniques for the deposition of transparent conductor oxide coatings using double C-MAG sputtering devices

摘要

A method of manufacturing a coated article, the method comprising: providing an article to be coated; providing a sputtering apparatus comprising: a vacuum chamber, a first and a second rotating cylindrical tubes located in close proximity to each other in another vacuum chamber, the first and second tubes respectively supporting a first and a second spray targets including a target material, at least one electrical power source operatively connected to the first and second sputtering tubes, and a swallow gas inlet located near the first and second tubes and on one side of the tubes opposite the article to be coated; providing a flow of oxygen to the vacuum chamber through the gas inlet of the swallower; providing an inert gas flow to the vacuum chamber to increase the pressure therein to about 10-3 to 10-2 mbar; rotating the first and second tubes at less than about 5 rpm; detecting the flow of oxygen inside the vacuum chamber and / or an amount of electricity applied to the first and second tubes; detect the partial pressure of oxygen; adjusting the flow of oxygen and / or the amount of electricity provided by at least one electrical power source to compensate for any detected variations in oxygen partial pressure; and depositing a coating on the article to be coated in the manufacture of the coated article.