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Helium cryostat with oil-free pumping to irradiate the semiconductor with electrons and measure in situ its optical characteristics

机译:氦低温恒温器无油泵浦,用电子辐照半导体并原位测量其光学特性

摘要

The utility model refers to cryogenic equipment. It is a demountable cryostat that allows irradiation of samples of semiconductor crystals with low-energy (up to 10 keV) electrons in high (at least 10) at a liquid helium temperature (4.2 K)-9mm. Hg) vacuum and in situ to register their optical spectra. The proposed cryostat can be used to investigate the radiation resistance of semiconductor crystals A2AT6th by their spectra of luminescence, reflection and absorption of light.;The task for solving the useful model is to improve the method for studying the surface properties of semiconductors based on their irradiation by low-energy (several keV) electrons in vacuum at a temperature of T = 4.2 K and in situ measurement of their optical spectra.;This problem is achieved by means of a helium cryostat with oil-free pumping to irradiate the semiconductor with electrons and measuring in situ its optical characteristics consisting of an external non-separable glass Dewar nitrogen vessel and an internal collapsible Helium Dewar vessel with an electron gun. In this case, the preliminary vacuum in a helium vessel is created by an oil-free (sorption) pump, and all separable and integral connections of the vessel parts with each other are performed without the use of a vacuum lubricant.
机译:本实用新型涉及低温设备。它是一种可拆卸的低温恒温器,可以在液氦温度(4.2 K) -9 mm下以高能量(至少10倍)照射低能量(最高10 keV)电子的半导体晶体样品。 Hg)真空并原位记录其光谱。所提出的低温恒温器可通过其发光,反射和吸收光谱来研究半导体晶体A 2 AT 6th 的抗辐射性。一个有用的模型是改进基于半导体的表面特性的研究方法,该方法基于半导体在T = 4.2 K的真空中被低能(几个keV)电子辐照并对其光谱进行原位测量。通过无油泵浦的氦低温恒温器向电子照射半导体,并就地测量其光学特性,该光学特性由外部不可分离的玻璃杜瓦瓶氮气容器和内部可折叠的氦杜瓦瓶容器以及电子枪组成。在这种情况下,氦容器中的初真空是通过无油(吸附)泵产生的,容器部件之间的所有可分离和整体连接都是在不使用真空润滑剂的情况下进行的。

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