ON-CHIP ALKALI DISPENSER and METHOD FOR FABRICATING THE SAME

摘要

The embodiments described herein provides on piece alkali distributor. On piece alkali distributor include a groove is defined on monolithic semiconductor substrate, and can evaporated metal material setting in the trench. Heating element is positioned close to transpirable metal material and is configured to provide for heat to transpirable metal material. Gettering material setting is for absorbing release deleterious material from transpirable metal material.