Heat exchanger for adjusting the temperature of the polishing surface of a polishing pad, polishing apparatus provided with the heat exchanger, method of polishing a substrate using the heat exchanger, and control of the temperature of the polishing surface of the polishing pad Computer readable recording medium recording the program of

摘要

The present invention provides a heat exchanger capable of preventing the sticking of a slurry. A heat exchanger (11) includes a flow channel structure (70) having a heating flow channel (61) and a cooling flow channel (62) formed therein, and a water repellent material (71) covering a side surface of the flow channel structure. The side surface 11 a of the heat exchanger 11 is composed of a water repellent material 71. [Selected figure] Figure 4