HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD, POLISHING APPARATUS HAVING SUCH HEAT EXCHANGER, POLISHING METHOD FOR SUBSTRATE USING SUCH HEAT EXCHANGER, AND COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD

摘要

OF THE DISCLOSURE HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD, POLISHING APPARATUS HAVING SUCH HEAT EXCHANGER, POLISHING METHOD FOR SUBSTRATE USING SUCH HEAT EXCHANGER, AND COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD A heat exchanger capable of preventing sticking of slurry is disclosed. The heat exchanger includes: a flow passage structure having a heating flow passage and a cooling flow passage formed therein; and a water-repellent material covering a side surface of the flow passage structure. A side surface of the heat exchanger is constituted by the water- repellent material. FIG. 4