METHOD FOR MANUFACTURING FZ SILICON RAW MATERIAL ROD AND METHOD FOR MANUFACTURING FZ SILICON SINGLE CRYSTAL

摘要

To provide a method for manufacturing an FZ silicon raw material rod, capable of reducing a processing loss due to the mechanical processing of a cone part when preparing an FZ silicon raw material rod using a silicon crystal rod manufactured by the CZ method to improve a yield.SOLUTION: The method for manufacturing an FZ silicon raw material rod when using a CZ silicon crystal rod as a silicon raw material rod in an FZ method comprises: presetting a target shape and allowable range of a cone part of the FZ silicon raw material rod; manufacturing the CZ silicon crystal rod on manufacturing conditions of forming the cone part into the target shape; determining whether or not the shape of the cone part of the CZ silicon crystal rod is in the allowable range; and obtaining the CZ silicon crystal rod as the FZ silicon raw material rod without machining the cone part for the allowable range and obtaining the CZ silicon crystal rod as the FZ silicon raw material rod by machining the cone part so as to be in the allowable range except for the allowable range.SELECTED DRAWING: Figure 1