MANUFACTURING METHOD OF FZ SINGLE CRYSTAL SILICON USING SILICON CRYSTAL ROD MANUFACTURED BY CZ METHOD AS RAW MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method of stably manufacturing a silicon single crystal to be manufactured by FZ method with prescribed resistivity.;SOLUTION: In the method of manufacturing silicon single crystals by FZ method, a P type or N type silicon crystal rod 1 having resistivity of 50 Ωcm or higher, which is a raw material stably available in high quality and manufactured by a CZ method, is used as a silicon raw material rod 1, instead of a high-price polycrystal silicon raw material rod usually used for the FZ method; the silicon raw material rod 1 is recrystalized to be the P type or N type silicon single crystal having desired resistivity by gas-doping the silicon raw material rod 1 with an impurity of the same conduction type as that of the silicon raw material rod 1.;COPYRIGHT: (C)2008,JPO&INPIT