Substrate heating apparatus, substrate processing system, and substrate heating method

摘要

To stably cure a coating material disposed on a base plate.SOLUTION: There is provided a device of heating a base plate, comprising a chamber provided with a storage space formed therein capable of storing a base plate, a decompression part capable of decompressing the atmosphere of the storage space, a base plate heating part disposed at least on one face or on the other face of the base plate and capable of heating the base plate, a pressure detection part capable of detecting the pressure of the storage space, and a controlling part that controls the base plate heating part according to a detection result of the pressure detection part.SELECTED DRAWING: Figure 19