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Patterned film articles and methods comprising cleavable crosslinkers
Patterned film articles and methods comprising cleavable crosslinkers
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机译:包含可裂解的交联剂的图案化膜制品和方法
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摘要
A patterned article comprising a copolymer having polymerized units derived from a cleavable crosslinkable monomer, wherein the pattern is imparted by releasing an initial acid from a thermal acid generator or a photoacid generator. By selectively releasing the acid, a pattern of high and low crosslink density results as a result of the initial acid cleaving some of the crosslinks. [Selection] Figure 2
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