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Detection device for detecting thickness of vacuum-evaporated film and vacuum evaporation apparatus

机译:真空蒸镀膜的厚度检测装置及真空蒸镀装置

摘要

Embodiments of the present invention disclose a detection device for detecting a thickness of a vacuum-evaporated film and a vacuum evaporation apparatus, thereby solving, for example, a problem that a conventional detection device results in excessively high production cost due to frequent replacement of a crystal plate. The detection device includes: a crystal plate, a detection structure provided with an opening corresponding to the crystal plate such that evaporated molecules or atoms are deposited on the crystal plate through the opening; and a filter disposed between the opening and the crystal plate.
机译:本发明的实施例公开了一种用于检测真空蒸发膜的厚度的检测装置和一种真空蒸发装置,从而解决了例如以下问题:常规检测装置由于频繁更换真空镀膜而导致生产成本过高。水晶板。所述检测装置包括:晶体板;检测结构,其具有与所述晶体板相对应的开口,使得蒸发的分子或原子通过所述开口沉积在所述晶体板上。过滤器设置在开口和晶体板之间。

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