CHARACTERIZATION OF AMORPHOUS VACUUM-EVAPORATED SnO_2 THIN FILMS

摘要

Tin oxide (SnO_2) thin films of thicknesses in the range 100-600 nm were prepared on glass substrates by vacuum evaporation at ambient temperature. The films were characterized by transmittance measurements, X-ray diffraction (XRD), scanning electron microscope (SEM) observations and energy dispersion X-ray analysis (EDAX). It is found that the films have high transmittance and non sharp absorption edges. XRD diffractograms showed that the films are amorphous and the SEM micrographs showed that the surfaces are smooth, uniform and well covered with the material. The EDAX analysis showed that the films are deficient in oxygen. Indirect optical bandgap energy and Urbach tailing in the bandgap was observed, and the width of the tail, which is related with disorder and localized states, was estimated.