GaAs DEVICE FOR SINGLE CRYSTAL GROWTH OF GaAs

摘要

The present invention relates to an apparatus for growing a GaAs single crystal, comprising: a tube-shaped ampoule having a vacuum inside; A crucible that rests on a support under the ampule and stores the raw material of GaAs; A heating unit comprising a plurality of heaters for heating the ampoule around the ampoule; And a cover portion sealing the crucible at an upper portion of the crucible.