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Transparent conductive oxide thin film substrate, method of fabricating the same, and organic light-emitting device and photovoltaic cell having the same
Transparent conductive oxide thin film substrate, method of fabricating the same, and organic light-emitting device and photovoltaic cell having the same
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机译:透明导电氧化物薄膜基板,其制造方法以及有机发光装置和光伏电池
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摘要
A transparent conductive oxide thin film substrate that has a high level of surface flatness, a method of fabricating the same, and an OLED and photovoltaic cell having the same. The transparent conductive oxide thin film substrate that includes a base substrate, a first transparent conductive oxide thin film formed on the base substrate, the first transparent conductive oxide thin film being treated with a first dopant, and a second transparent conductive oxide thin film formed on the first transparent conductive oxide thin film. The second transparent conductive oxide thin film is treated with a second dopant at a higher concentration than the first dopant. The surface of the second transparent conductive oxide thin film is flatter than the surface of the first transparent conductive oxide thin film.
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