The invention relates to a method for manufacturing a planarized etch-stop layer (13), ESL, for a hydrofluoric acid, HF, vapor phase etching process. The method comprises providing a first planarized layer (17) on top of a surface of a substrate (10), the first planarized layer (17) comprising a patterned and structured metallic material (20) and a filling material (22). The method further comprises depositing on top of the first planarized layer (17) the planarized ESL (13) of an ESL material (23) with low HF etch rate, wherein the planarized ESL (13) has a low surface roughness and a thickness of less than 150nm, in particular of less than 100nm.
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